Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review)

High efficiency tin-based EUV sources

We have previously proposed ithography applications. Here we report advances in measurement

Determination of Charge State, Energy and Angular Distributions of Tin Ions Emitted from Laser Produced Plasma Based Euv Sources. Determination of Charge State, Energy and Angular Distributions of Tin Ions Emitted from Laser Produced Plasma Based Euv Sources

We have performed time of flight (TOF) analysis to determine the intensity of ion distribution from tin based plasma for a range of charged tin ions (Sn–Sn). A Nd:YAG laser operating at 1064 nm with a full width at half maximum pulse duration of 5.2 ns was used to create the plasma under vacuum with a base pressure of 10−6 Torr. The plasma formation occurred on a custom made optical system, whi...

InP-based Long Wavelength Sources for Solid State Lasers Pumping

Diagnostics for laser plasma EUV sources

A high repetition-rate laser plasma source, possessing distinct radiation and particle emission characteristics, is now a principal candidate light source for the next generation of technology for the fabrication of computer chips. For these sources to satisfy this critical need they will need to meet unprecedented levels of performance, stability and lifetime. We review here some of the princi...

Solid-State Lasers